4/30/2010	5:22:54 PM	SiCl4 post valve opened
4/30/2010	5:23:02 PM	SiCl4 post valve closed
4/30/2010	5:25:38 PM	Bypass valve closed
4/30/2010	5:25:38 PM	Main Vac valve closed
4/30/2010	5:28:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	5:28:59 PM	Recipe started at 5:28 PM
4/30/2010	5:28:59 PM	H2 valve closed
4/30/2010	5:28:59 PM	BCl3 valve closed
4/30/2010	5:28:59 PM	PH3 valve closed
4/30/2010	5:28:59 PM	SiCl4 pre valve closed
4/30/2010	5:28:59 PM	SiCl4 post valve closed
4/30/2010	5:28:59 PM	Main Vac valve closed
4/30/2010	5:28:59 PM	Bypass valve closed
4/30/2010	5:28:59 PM	Bubbler valve closed
4/30/2010	5:28:59 PM	Helium valve opened
4/30/2010	5:28:59 PM	Helium MFC set to  500.000000
4/30/2010	5:28:59 PM	H2 MFC set to  0.000000
4/30/2010	5:28:59 PM	BCl3 MFC set to  0.000000
4/30/2010	5:28:59 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:28:59 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:28:59 PM	Tube furnace set to 0
4/30/2010	5:30:18 PM	Helium valve closed
4/30/2010	5:30:19 PM	H2 valve closed
4/30/2010	5:30:19 PM	BCl3 valve closed
4/30/2010	5:30:19 PM	PH3 valve closed
4/30/2010	5:30:19 PM	SiCl4 pre valve closed
4/30/2010	5:30:19 PM	SiCl4 post valve closed
4/30/2010	5:30:19 PM	Main Vac valve closed
4/30/2010	5:30:19 PM	Bypass valve closed
4/30/2010	5:30:19 PM	Bubbler valve closed
4/30/2010	5:30:19 PM	Helium MFC set to  0.000000
4/30/2010	5:30:19 PM	H2 MFC set to  0.000000
4/30/2010	5:30:19 PM	BCl3 MFC set to  0.000000
4/30/2010	5:30:19 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:30:19 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:30:19 PM	Tube furnace set to 0
4/30/2010	5:30:19 PM	Run finished at 5:30 PM
4/30/2010	5:30:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	5:30:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	5:30:24 PM	Recipe started at 5:30 PM
4/30/2010	5:30:24 PM	Helium valve closed
4/30/2010	5:30:24 PM	H2 valve closed
4/30/2010	5:30:24 PM	BCl3 valve closed
4/30/2010	5:30:24 PM	PH3 valve closed
4/30/2010	5:30:24 PM	SiCl4 pre valve closed
4/30/2010	5:30:24 PM	SiCl4 post valve closed
4/30/2010	5:30:24 PM	Main Vac valve closed
4/30/2010	5:30:24 PM	Bubbler valve closed
4/30/2010	5:30:24 PM	Bypass valve opened
4/30/2010	5:30:24 PM	Helium MFC set to  0.000000
4/30/2010	5:30:24 PM	H2 MFC set to  0.000000
4/30/2010	5:30:24 PM	BCl3 MFC set to  0.000000
4/30/2010	5:30:24 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:30:24 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:30:24 PM	Tube furnace set to 0
4/30/2010	5:30:54 PM	Helium valve closed
4/30/2010	5:30:54 PM	H2 valve closed
4/30/2010	5:30:54 PM	BCl3 valve closed
4/30/2010	5:30:54 PM	PH3 valve closed
4/30/2010	5:30:54 PM	SiCl4 pre valve closed
4/30/2010	5:30:54 PM	SiCl4 post valve closed
4/30/2010	5:30:54 PM	Bubbler valve closed
4/30/2010	5:30:54 PM	Main Vac valve opened
4/30/2010	5:30:54 PM	Bypass valve opened
4/30/2010	5:30:54 PM	Helium MFC set to  0.000000
4/30/2010	5:30:54 PM	H2 MFC set to  0.000000
4/30/2010	5:30:54 PM	BCl3 MFC set to  0.000000
4/30/2010	5:30:54 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:30:54 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:30:55 PM	Tube furnace set to 0
4/30/2010	5:30:55 PM	Run finished at 5:30 PM
4/30/2010	5:30:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	5:47:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	5:47:55 PM	Recipe started at 5:47 PM
4/30/2010	5:47:55 PM	H2 valve closed
4/30/2010	5:47:55 PM	BCl3 valve closed
4/30/2010	5:47:55 PM	PH3 valve closed
4/30/2010	5:47:55 PM	SiCl4 pre valve closed
4/30/2010	5:47:55 PM	SiCl4 post valve closed
4/30/2010	5:47:55 PM	Main Vac valve closed
4/30/2010	5:47:55 PM	Bypass valve closed
4/30/2010	5:47:55 PM	Bubbler valve closed
4/30/2010	5:47:55 PM	Helium valve opened
4/30/2010	5:47:55 PM	Helium MFC set to  500.000000
4/30/2010	5:47:55 PM	H2 MFC set to  0.000000
4/30/2010	5:47:55 PM	BCl3 MFC set to  0.000000
4/30/2010	5:47:55 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:47:55 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:47:55 PM	Tube furnace set to 0
4/30/2010	5:49:16 PM	Helium valve closed
4/30/2010	5:49:16 PM	H2 valve closed
4/30/2010	5:49:16 PM	BCl3 valve closed
4/30/2010	5:49:16 PM	PH3 valve closed
4/30/2010	5:49:16 PM	SiCl4 pre valve closed
4/30/2010	5:49:16 PM	SiCl4 post valve closed
4/30/2010	5:49:16 PM	Main Vac valve closed
4/30/2010	5:49:16 PM	Bypass valve closed
4/30/2010	5:49:16 PM	Bubbler valve closed
4/30/2010	5:49:16 PM	Helium MFC set to  0.000000
4/30/2010	5:49:16 PM	H2 MFC set to  0.000000
4/30/2010	5:49:16 PM	BCl3 MFC set to  0.000000
4/30/2010	5:49:16 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:49:16 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:49:16 PM	Tube furnace set to 0
4/30/2010	5:49:16 PM	Run finished at 5:49 PM
4/30/2010	5:49:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	5:54:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	5:54:17 PM	Recipe started at 5:54 PM
4/30/2010	5:54:17 PM	Helium valve closed
4/30/2010	5:54:17 PM	H2 valve closed
4/30/2010	5:54:17 PM	BCl3 valve closed
4/30/2010	5:54:17 PM	PH3 valve closed
4/30/2010	5:54:17 PM	SiCl4 pre valve closed
4/30/2010	5:54:17 PM	SiCl4 post valve closed
4/30/2010	5:54:17 PM	Main Vac valve closed
4/30/2010	5:54:17 PM	Bubbler valve closed
4/30/2010	5:54:17 PM	Bypass valve opened
4/30/2010	5:54:17 PM	Helium MFC set to  0.000000
4/30/2010	5:54:17 PM	H2 MFC set to  0.000000
4/30/2010	5:54:17 PM	BCl3 MFC set to  0.000000
4/30/2010	5:54:17 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:54:17 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:54:17 PM	Tube furnace set to 0
4/30/2010	5:54:47 PM	Helium valve closed
4/30/2010	5:54:47 PM	H2 valve closed
4/30/2010	5:54:47 PM	BCl3 valve closed
4/30/2010	5:54:47 PM	PH3 valve closed
4/30/2010	5:54:47 PM	SiCl4 pre valve closed
4/30/2010	5:54:47 PM	SiCl4 post valve closed
4/30/2010	5:54:47 PM	Bubbler valve closed
4/30/2010	5:54:47 PM	Main Vac valve opened
4/30/2010	5:54:47 PM	Bypass valve opened
4/30/2010	5:54:47 PM	Helium MFC set to  0.000000
4/30/2010	5:54:47 PM	H2 MFC set to  0.000000
4/30/2010	5:54:47 PM	BCl3 MFC set to  0.000000
4/30/2010	5:54:47 PM	SiCl4 MFC set to  0.000000
4/30/2010	5:54:47 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	5:54:48 PM	Tube furnace set to 0
4/30/2010	5:54:48 PM	Run finished at 5:54 PM
4/30/2010	5:54:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	5:56:02 PM	Bypass valve closed
4/30/2010	5:56:02 PM	Main Vac valve closed
4/30/2010	5:56:16 PM	Main Vac valve opened
4/30/2010	5:56:17 PM	Bypass valve opened
4/30/2010	5:57:04 PM	Bypass valve closed
4/30/2010	5:57:04 PM	Main Vac valve closed
4/30/2010	5:57:19 PM	Main Vac valve opened
4/30/2010	5:57:19 PM	Bypass valve opened
4/30/2010	5:58:56 PM	Bypass valve closed
4/30/2010	5:58:56 PM	Main Vac valve closed
4/30/2010	5:59:18 PM	Bypass valve opened
4/30/2010	5:59:19 PM	Main Vac valve opened
4/30/2010	5:59:26 PM	SiCl4 post valve opened
4/30/2010	6:08:11 PM	Bypass valve closed
4/30/2010	6:08:11 PM	Main Vac valve closed
4/30/2010	6:09:05 PM	Main Vac valve opened
4/30/2010	6:09:06 PM	Bypass valve opened
4/30/2010	6:10:21 PM	Bypass valve closed
4/30/2010	6:10:21 PM	Main Vac valve closed
4/30/2010	6:11:28 PM	Bypass valve opened
4/30/2010	6:11:29 PM	Main Vac valve opened
4/30/2010	6:13:27 PM	SiCl4 post valve closed
4/30/2010	6:14:21 PM	Helium valve opened
4/30/2010	6:14:31 PM	Helium MFC set to  500.000000
4/30/2010	6:15:01 PM	SiCl4 MFC set to  500.000000
4/30/2010	6:15:27 PM	SiCl4 pre valve opened
4/30/2010	6:26:30 PM	Bypass valve closed
4/30/2010	6:26:30 PM	Main Vac valve closed
4/30/2010	6:27:33 PM	Bypass valve opened
4/30/2010	6:27:33 PM	Main Vac valve opened
4/30/2010	6:29:57 PM	Helium valve closed
4/30/2010	6:29:58 PM	SiCl4 pre valve closed
4/30/2010	6:29:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:30:00 PM	Recipe started at 6:30 PM
4/30/2010	6:30:00 PM	H2 valve closed
4/30/2010	6:30:00 PM	BCl3 valve closed
4/30/2010	6:30:00 PM	PH3 valve closed
4/30/2010	6:30:00 PM	SiCl4 pre valve closed
4/30/2010	6:30:00 PM	SiCl4 post valve closed
4/30/2010	6:30:00 PM	Main Vac valve closed
4/30/2010	6:30:00 PM	Bypass valve closed
4/30/2010	6:30:00 PM	Bubbler valve closed
4/30/2010	6:30:00 PM	Helium valve opened
4/30/2010	6:30:00 PM	Helium MFC set to  500.000000
4/30/2010	6:30:00 PM	H2 MFC set to  0.000000
4/30/2010	6:30:00 PM	BCl3 MFC set to  0.000000
4/30/2010	6:30:00 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:30:00 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:30:00 PM	Tube furnace set to 0
4/30/2010	6:38:33 PM	Helium valve closed
4/30/2010	6:38:33 PM	H2 valve closed
4/30/2010	6:38:33 PM	BCl3 valve closed
4/30/2010	6:38:33 PM	PH3 valve closed
4/30/2010	6:38:33 PM	SiCl4 pre valve closed
4/30/2010	6:38:33 PM	SiCl4 post valve closed
4/30/2010	6:38:33 PM	Main Vac valve closed
4/30/2010	6:38:33 PM	Bypass valve closed
4/30/2010	6:38:33 PM	Bubbler valve closed
4/30/2010	6:38:33 PM	Helium MFC set to  0.000000
4/30/2010	6:38:33 PM	H2 MFC set to  0.000000
4/30/2010	6:38:33 PM	BCl3 MFC set to  0.000000
4/30/2010	6:38:33 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:38:33 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:38:34 PM	Tube furnace set to 0
4/30/2010	6:38:34 PM	Run finished at 6:38 PM
4/30/2010	6:38:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:38:40 PM	Bypass valve opened
4/30/2010	6:38:42 PM	Bypass valve closed
4/30/2010	6:38:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:38:47 PM	Recipe started at 6:38 PM
4/30/2010	6:38:47 PM	H2 valve closed
4/30/2010	6:38:47 PM	BCl3 valve closed
4/30/2010	6:38:47 PM	PH3 valve closed
4/30/2010	6:38:47 PM	SiCl4 pre valve closed
4/30/2010	6:38:47 PM	SiCl4 post valve closed
4/30/2010	6:38:47 PM	Main Vac valve closed
4/30/2010	6:38:47 PM	Bypass valve closed
4/30/2010	6:38:47 PM	Bubbler valve closed
4/30/2010	6:38:47 PM	Helium valve opened
4/30/2010	6:38:47 PM	Helium MFC set to  500.000000
4/30/2010	6:38:47 PM	H2 MFC set to  0.000000
4/30/2010	6:38:47 PM	BCl3 MFC set to  0.000000
4/30/2010	6:38:47 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:38:47 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:38:48 PM	Tube furnace set to 0
4/30/2010	6:38:48 PM	Helium valve closed
4/30/2010	6:38:48 PM	H2 valve closed
4/30/2010	6:38:48 PM	BCl3 valve closed
4/30/2010	6:38:48 PM	PH3 valve closed
4/30/2010	6:38:48 PM	SiCl4 pre valve closed
4/30/2010	6:38:48 PM	SiCl4 post valve closed
4/30/2010	6:38:48 PM	Main Vac valve closed
4/30/2010	6:38:48 PM	Bypass valve closed
4/30/2010	6:38:48 PM	Bubbler valve closed
4/30/2010	6:38:48 PM	Helium MFC set to  0.000000
4/30/2010	6:38:48 PM	H2 MFC set to  0.000000
4/30/2010	6:38:48 PM	BCl3 MFC set to  0.000000
4/30/2010	6:38:48 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:38:48 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:38:48 PM	Tube furnace set to 0
4/30/2010	6:38:48 PM	Run finished at 6:38 PM
4/30/2010	6:38:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:38:51 PM	Bypass valve opened
4/30/2010	6:38:54 PM	Bypass valve closed
4/30/2010	6:38:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:38:56 PM	Recipe started at 6:38 PM
4/30/2010	6:38:56 PM	H2 valve closed
4/30/2010	6:38:56 PM	BCl3 valve closed
4/30/2010	6:38:56 PM	PH3 valve closed
4/30/2010	6:38:56 PM	SiCl4 pre valve closed
4/30/2010	6:38:56 PM	SiCl4 post valve closed
4/30/2010	6:38:56 PM	Main Vac valve closed
4/30/2010	6:38:56 PM	Bypass valve closed
4/30/2010	6:38:56 PM	Bubbler valve closed
4/30/2010	6:38:56 PM	Helium valve opened
4/30/2010	6:38:56 PM	Helium MFC set to  500.000000
4/30/2010	6:38:56 PM	H2 MFC set to  0.000000
4/30/2010	6:38:56 PM	BCl3 MFC set to  0.000000
4/30/2010	6:38:56 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:38:56 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:38:56 PM	Tube furnace set to 0
4/30/2010	6:39:21 PM	Helium valve closed
4/30/2010	6:39:21 PM	H2 valve closed
4/30/2010	6:39:21 PM	BCl3 valve closed
4/30/2010	6:39:21 PM	PH3 valve closed
4/30/2010	6:39:21 PM	SiCl4 pre valve closed
4/30/2010	6:39:21 PM	SiCl4 post valve closed
4/30/2010	6:39:21 PM	Main Vac valve closed
4/30/2010	6:39:21 PM	Bypass valve closed
4/30/2010	6:39:21 PM	Bubbler valve closed
4/30/2010	6:39:21 PM	Helium MFC set to  0.000000
4/30/2010	6:39:21 PM	H2 MFC set to  0.000000
4/30/2010	6:39:21 PM	BCl3 MFC set to  0.000000
4/30/2010	6:39:21 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:39:21 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:39:22 PM	Tube furnace set to 0
4/30/2010	6:39:22 PM	Run finished at 6:39 PM
4/30/2010	6:39:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	6:39:28 PM	SiCl4 post valve opened
4/30/2010	6:39:31 PM	SiCl4 post valve closed
4/30/2010	6:39:39 PM	SiCl4 MFC set to  500.000000
4/30/2010	6:40:05 PM	SiCl4 pre valve opened
4/30/2010	6:40:05 PM	SiCl4 pre valve closed
4/30/2010	6:40:07 PM	SiCl4 pre valve opened
4/30/2010	6:40:08 PM	SiCl4 pre valve closed
4/30/2010	6:40:09 PM	SiCl4 pre valve opened
4/30/2010	6:40:11 PM	SiCl4 pre valve closed
4/30/2010	6:40:14 PM	SiCl4 pre valve opened
4/30/2010	6:40:15 PM	SiCl4 pre valve closed
4/30/2010	6:44:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	6:44:42 PM	Recipe started at 6:44 PM
4/30/2010	6:44:42 PM	Helium valve closed
4/30/2010	6:44:42 PM	H2 valve closed
4/30/2010	6:44:42 PM	BCl3 valve closed
4/30/2010	6:44:42 PM	PH3 valve closed
4/30/2010	6:44:42 PM	SiCl4 pre valve closed
4/30/2010	6:44:42 PM	SiCl4 post valve closed
4/30/2010	6:44:42 PM	Main Vac valve closed
4/30/2010	6:44:42 PM	Bubbler valve closed
4/30/2010	6:44:42 PM	Bypass valve opened
4/30/2010	6:44:42 PM	Helium MFC set to  0.000000
4/30/2010	6:44:42 PM	H2 MFC set to  0.000000
4/30/2010	6:44:42 PM	BCl3 MFC set to  0.000000
4/30/2010	6:44:42 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:44:42 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:44:43 PM	Tube furnace set to 0
4/30/2010	6:45:24 PM	Helium valve closed
4/30/2010	6:45:24 PM	H2 valve closed
4/30/2010	6:45:24 PM	BCl3 valve closed
4/30/2010	6:45:24 PM	PH3 valve closed
4/30/2010	6:45:24 PM	SiCl4 pre valve closed
4/30/2010	6:45:24 PM	SiCl4 post valve closed
4/30/2010	6:45:24 PM	Bubbler valve closed
4/30/2010	6:45:24 PM	Main Vac valve opened
4/30/2010	6:45:24 PM	Bypass valve opened
4/30/2010	6:45:24 PM	Helium MFC set to  0.000000
4/30/2010	6:45:24 PM	H2 MFC set to  0.000000
4/30/2010	6:45:24 PM	BCl3 MFC set to  0.000000
4/30/2010	6:45:24 PM	SiCl4 MFC set to  0.000000
4/30/2010	6:45:24 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	6:45:24 PM	Tube furnace set to 0
4/30/2010	6:45:25 PM	Run finished at 6:45 PM
4/30/2010	6:45:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	6:55:04 PM	Bypass valve closed
4/30/2010	6:55:04 PM	Main Vac valve closed
4/30/2010	6:55:27 PM	Main Vac valve opened
4/30/2010	6:55:28 PM	Bypass valve opened
4/30/2010	7:18:48 PM	Bypass valve closed
4/30/2010	7:18:48 PM	Main Vac valve closed
4/30/2010	7:19:14 PM	Main Vac valve opened
4/30/2010	7:19:15 PM	Bypass valve opened
4/30/2010	7:19:35 PM	Bypass valve closed
4/30/2010	7:19:35 PM	Main Vac valve closed
4/30/2010	7:19:39 PM	Helium MFC set to  500.000000
4/30/2010	7:19:40 PM	Helium valve opened
4/30/2010	7:20:26 PM	Helium valve closed
4/30/2010	7:20:39 PM	Helium valve opened
4/30/2010	7:21:18 PM	Helium valve closed
4/30/2010	7:21:25 PM	Bypass valve opened
4/30/2010	7:21:25 PM	Bypass valve closed
4/30/2010	7:21:27 PM	Helium valve opened
4/30/2010	7:21:32 PM	Helium valve closed
4/30/2010	7:21:36 PM	Helium valve opened
4/30/2010	7:21:44 PM	SiCl4 post valve opened
4/30/2010	7:21:46 PM	SiCl4 post valve closed
4/30/2010	7:22:15 PM	SiCl4 MFC set to  500.000000
4/30/2010	7:22:21 PM	SiCl4 pre valve opened
4/30/2010	7:23:03 PM	SiCl4 pre valve closed
4/30/2010	7:23:04 PM	Helium valve closed
4/30/2010	7:23:10 PM	SiCl4 post valve opened
4/30/2010	7:23:11 PM	SiCl4 post valve closed
4/30/2010	7:26:42 PM	SiCl4 post valve opened
4/30/2010	7:26:42 PM	SiCl4 post valve closed
4/30/2010	7:26:48 PM	Bypass valve opened
4/30/2010	7:26:48 PM	Bypass valve closed
4/30/2010	7:26:56 PM	SiCl4 post valve opened
4/30/2010	7:26:56 PM	SiCl4 post valve closed
4/30/2010	7:26:59 PM	SiCl4 post valve opened
4/30/2010	7:27:00 PM	SiCl4 post valve closed
4/30/2010	7:27:02 PM	SiCl4 post valve opened
4/30/2010	7:27:04 PM	SiCl4 post valve closed
4/30/2010	7:27:10 PM	Bypass valve opened
4/30/2010	7:27:10 PM	Bypass valve closed
4/30/2010	7:27:12 PM	Bypass valve opened
4/30/2010	7:27:12 PM	Bypass valve closed
4/30/2010	7:28:06 PM	SiCl4 MFC set to  325.000000
4/30/2010	7:28:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	7:28:49 PM	Recipe started at 7:28 PM
4/30/2010	7:28:49 PM	Helium valve closed
4/30/2010	7:28:49 PM	H2 valve closed
4/30/2010	7:28:49 PM	BCl3 valve closed
4/30/2010	7:28:49 PM	PH3 valve closed
4/30/2010	7:28:49 PM	SiCl4 pre valve closed
4/30/2010	7:28:49 PM	SiCl4 post valve closed
4/30/2010	7:28:49 PM	Main Vac valve closed
4/30/2010	7:28:49 PM	Bubbler valve closed
4/30/2010	7:28:49 PM	Bypass valve opened
4/30/2010	7:28:49 PM	Helium MFC set to  0.000000
4/30/2010	7:28:49 PM	H2 MFC set to  0.000000
4/30/2010	7:28:49 PM	BCl3 MFC set to  0.000000
4/30/2010	7:28:49 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:28:49 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:28:49 PM	Tube furnace set to 0
4/30/2010	7:29:27 PM	Helium valve closed
4/30/2010	7:29:27 PM	H2 valve closed
4/30/2010	7:29:27 PM	BCl3 valve closed
4/30/2010	7:29:27 PM	PH3 valve closed
4/30/2010	7:29:27 PM	SiCl4 pre valve closed
4/30/2010	7:29:27 PM	SiCl4 post valve closed
4/30/2010	7:29:27 PM	Bubbler valve closed
4/30/2010	7:29:27 PM	Main Vac valve opened
4/30/2010	7:29:27 PM	Bypass valve opened
4/30/2010	7:29:27 PM	Helium MFC set to  0.000000
4/30/2010	7:29:27 PM	H2 MFC set to  0.000000
4/30/2010	7:29:27 PM	BCl3 MFC set to  0.000000
4/30/2010	7:29:27 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:29:27 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:29:27 PM	Tube furnace set to 0
4/30/2010	7:29:27 PM	Run finished at 7:29 PM
4/30/2010	7:29:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	7:34:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	7:34:08 PM	Recipe started at 7:34 PM
4/30/2010	7:34:08 PM	H2 valve closed
4/30/2010	7:34:08 PM	BCl3 valve closed
4/30/2010	7:34:08 PM	PH3 valve closed
4/30/2010	7:34:08 PM	SiCl4 pre valve closed
4/30/2010	7:34:08 PM	SiCl4 post valve closed
4/30/2010	7:34:08 PM	Main Vac valve closed
4/30/2010	7:34:08 PM	Bypass valve closed
4/30/2010	7:34:08 PM	Bubbler valve closed
4/30/2010	7:34:08 PM	Helium valve opened
4/30/2010	7:34:08 PM	Helium MFC set to  500.000000
4/30/2010	7:34:08 PM	H2 MFC set to  0.000000
4/30/2010	7:34:08 PM	BCl3 MFC set to  0.000000
4/30/2010	7:34:08 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:34:08 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:34:08 PM	Tube furnace set to 0
4/30/2010	7:35:28 PM	Helium valve closed
4/30/2010	7:35:28 PM	H2 valve closed
4/30/2010	7:35:28 PM	BCl3 valve closed
4/30/2010	7:35:28 PM	PH3 valve closed
4/30/2010	7:35:28 PM	SiCl4 pre valve closed
4/30/2010	7:35:28 PM	SiCl4 post valve closed
4/30/2010	7:35:28 PM	Main Vac valve closed
4/30/2010	7:35:28 PM	Bypass valve closed
4/30/2010	7:35:28 PM	Bubbler valve closed
4/30/2010	7:35:28 PM	Helium MFC set to  0.000000
4/30/2010	7:35:28 PM	H2 MFC set to  0.000000
4/30/2010	7:35:28 PM	BCl3 MFC set to  0.000000
4/30/2010	7:35:28 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:35:28 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:35:28 PM	Tube furnace set to 0
4/30/2010	7:35:29 PM	Run finished at 7:35 PM
4/30/2010	7:35:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	7:40:22 PM	SiCl4 post valve opened
4/30/2010	7:40:22 PM	SiCl4 post valve closed
4/30/2010	7:40:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	7:40:29 PM	Recipe started at 7:40 PM
4/30/2010	7:40:29 PM	Helium valve closed
4/30/2010	7:40:29 PM	H2 valve closed
4/30/2010	7:40:29 PM	BCl3 valve closed
4/30/2010	7:40:29 PM	PH3 valve closed
4/30/2010	7:40:29 PM	SiCl4 pre valve closed
4/30/2010	7:40:29 PM	SiCl4 post valve closed
4/30/2010	7:40:29 PM	Main Vac valve closed
4/30/2010	7:40:29 PM	Bubbler valve closed
4/30/2010	7:40:29 PM	Bypass valve opened
4/30/2010	7:40:29 PM	Helium MFC set to  0.000000
4/30/2010	7:40:29 PM	H2 MFC set to  0.000000
4/30/2010	7:40:29 PM	BCl3 MFC set to  0.000000
4/30/2010	7:40:29 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:40:29 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:40:30 PM	Tube furnace set to 0
4/30/2010	7:41:05 PM	Helium valve closed
4/30/2010	7:41:05 PM	H2 valve closed
4/30/2010	7:41:05 PM	BCl3 valve closed
4/30/2010	7:41:05 PM	PH3 valve closed
4/30/2010	7:41:05 PM	SiCl4 pre valve closed
4/30/2010	7:41:05 PM	SiCl4 post valve closed
4/30/2010	7:41:05 PM	Bubbler valve closed
4/30/2010	7:41:05 PM	Main Vac valve opened
4/30/2010	7:41:05 PM	Bypass valve opened
4/30/2010	7:41:05 PM	Helium MFC set to  0.000000
4/30/2010	7:41:05 PM	H2 MFC set to  0.000000
4/30/2010	7:41:05 PM	BCl3 MFC set to  0.000000
4/30/2010	7:41:05 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:41:05 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:41:05 PM	Tube furnace set to 0
4/30/2010	7:41:05 PM	Run finished at 7:41 PM
4/30/2010	7:41:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/30/2010	7:43:23 PM	Bypass valve closed
4/30/2010	7:43:24 PM	Main Vac valve closed
4/30/2010	7:43:24 PM	Main Vac valve opened
4/30/2010	7:43:25 PM	Main Vac valve closed
4/30/2010	7:43:38 PM	Bypass valve opened
4/30/2010	7:43:38 PM	Main Vac valve opened
4/30/2010	7:46:08 PM	Bypass valve closed
4/30/2010	7:46:08 PM	Main Vac valve closed
4/30/2010	7:46:18 PM	Tube furnace set to 1000
4/30/2010	7:46:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	7:46:24 PM	Recipe started at 7:46 PM
4/30/2010	7:46:24 PM	H2 valve closed
4/30/2010	7:46:24 PM	BCl3 valve closed
4/30/2010	7:46:24 PM	PH3 valve closed
4/30/2010	7:46:24 PM	SiCl4 pre valve closed
4/30/2010	7:46:24 PM	SiCl4 post valve closed
4/30/2010	7:46:24 PM	Main Vac valve closed
4/30/2010	7:46:24 PM	Bypass valve closed
4/30/2010	7:46:24 PM	Bubbler valve closed
4/30/2010	7:46:24 PM	Helium valve opened
4/30/2010	7:46:24 PM	Helium MFC set to  500.000000
4/30/2010	7:46:24 PM	H2 MFC set to  0.000000
4/30/2010	7:46:24 PM	BCl3 MFC set to  0.000000
4/30/2010	7:46:24 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:46:24 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:46:24 PM	Tube furnace set to 0
4/30/2010	7:47:44 PM	Helium valve closed
4/30/2010	7:47:44 PM	H2 valve closed
4/30/2010	7:47:44 PM	BCl3 valve closed
4/30/2010	7:47:44 PM	PH3 valve closed
4/30/2010	7:47:44 PM	SiCl4 pre valve closed
4/30/2010	7:47:44 PM	SiCl4 post valve closed
4/30/2010	7:47:44 PM	Main Vac valve closed
4/30/2010	7:47:44 PM	Bypass valve closed
4/30/2010	7:47:44 PM	Bubbler valve closed
4/30/2010	7:47:44 PM	Helium MFC set to  0.000000
4/30/2010	7:47:44 PM	H2 MFC set to  0.000000
4/30/2010	7:47:44 PM	BCl3 MFC set to  0.000000
4/30/2010	7:47:44 PM	SiCl4 MFC set to  0.000000
4/30/2010	7:47:44 PM	Bypass solenoid MFC set to  0.000000
4/30/2010	7:47:44 PM	Tube furnace set to 0
4/30/2010	7:47:44 PM	Run finished at 7:47 PM
4/30/2010	7:47:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/30/2010	7:47:48 PM	Tube furnace set to 1000
4/30/2010	7:47:56 PM	Helium MFC set to  500.000000
4/30/2010	7:47:58 PM	Helium valve opened
4/30/2010	7:48:04 PM	Bubbler valve opened
4/30/2010	7:49:29 PM	H2 MFC set to  500.000000
4/30/2010	7:49:34 PM	SiCl4 MFC set to  325.000000
4/30/2010	8:09:00 PM	H2 valve opened
4/30/2010	8:09:02 PM	Helium valve closed
4/30/2010	8:11:11 PM	Bubbler valve closed
4/30/2010	8:11:12 PM	H2 valve closed
4/30/2010	8:11:23 PM	SiCl4 pre valve opened
4/30/2010	8:11:24 PM	SiCl4 post valve opened
4/30/2010	8:11:26 PM	SiCl4 post valve closed
4/30/2010	8:11:27 PM	SiCl4 pre valve closed
4/30/2010	8:11:31 PM	H2 valve opened
4/30/2010	8:11:32 PM	Bubbler valve opened
4/30/2010	8:11:50 PM	SiCl4 pre valve opened
4/30/2010	8:11:51 PM	SiCl4 post valve opened
4/30/2010	8:31:54 PM	SiCl4 post valve closed
4/30/2010	8:31:54 PM	SiCl4 pre valve closed
4/30/2010	8:32:00 PM	Helium valve opened
4/30/2010	8:32:00 PM	H2 valve closed
4/30/2010	8:35:35 PM	Bubbler valve closed
4/30/2010	8:35:36 PM	Helium valve closed
4/30/2010	8:35:39 PM	Bypass valve opened
4/30/2010	8:35:53 PM	Main Vac valve opened
4/30/2010	8:36:00 PM	Tube furnace set to 0
